Ghufron M, Yunata EE, Aizawa T. Simulasi 1D Pengaruh Tekanan Terhadap Densitas Elektron pada Plasma Argon DC Bias Discharge. SMARTICS [Internet]. 2016 Apr. 19 [cited 2024 May 8];2(1):30-3. Available from: https://ejournal.unikama.ac.id/index.php/jst/article/view/1512